ASM Microchemistry Oy (Finland)
ASM Microchemistry, a Finland-based company of 10 people, is solely an R&D site that concentrates on the emerging Atomic Layer Deposition (ALD) technology providing quality thin film solutions for the latest, as well as future, semiconductor device designs. It originated from Microchemistry a Finish start-up, founded by Suntala, the inventor of the ALD principle (basic patents 1978-1983).in 1987. In 1999 ASM International became the owner of the company.
ASM Microchemistry has a number of R&D tools – four 200mm ALD reactors integrated with automatic wafer handlers that are located in the clean room environment, two stand-alone ALD reactor capable of processing up to 300mm wafers of which one is a mini-batch reactor, and two stand-alone small scale research reactors. The personnel of ASMM have in average more than 10 years experience in ALD technology in both reactor and process technology.